Use of TMAH in Dry Film Resist Formulations
Earlier evaluations of TMAH and choline were conducted as separate formulations. In such a comparison choline performance was sub-standard to TMAH. While in this series of test products similar results were recorded, the blending of the separate raw materials produced baths that were an improvement over the standard TMAH control. While control over the ratio of TMAH/choline are somewhat restricting, the net result enhances the performance of both.