Mobius System for Recycling TMAH with Water Recovery White Paper
A plant to recycle waste discharged from photolithography processes has been operating successfully in Osaka, Japan for two years. The waste is separated into a regenerated stream of high quality TMAH for reuse, a stream of high quality water for reuse, and a concentrated solid waste steam.
Mobius System™ TMAH recycling facility
- designed to recycle TMAH waste streams from Fabs
- recycles at various concentrations
- is able to purify TMAH into ultra-high purity grades